| NODE | TYPE | DESCRIPTION | LOCATION (IF APPLICABLE) | Person to Contact for access | Email for access |
|---|---|---|---|---|---|
| The Australian National University | Device Testing and Packaging | Blackbody source for MIR photodetector characterisaion | Research School of Physics | Lan Fu | lan.fu@anu.edu.au |
| The Australian National University | Device Testing and Packaging | Laser diode test bench, inclduing laser diode scriber | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Device Testing and Packaging | Quantum efficiency measurement system | Research School of Physics | Lan Fu | lan.fu@anu.edu.au |
| The Australian National University | Device Testing and Packaging | Solar simulator | Research School of Physics | Lan Fu | lan.fu@anu.edu.au |
| The Australian National University | Device Testing and Packaging | Wire bonders and flip chip bonder | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Atomic force microscope (AFM) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Hall effect, deep level transient spectroscopy (DLTS), I-V, C-V, four-point probe | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Hi-resolution x-ray diffraction (XRD) | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Photoelectrochemical setup | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Rutherford backscattering spectrometry (RBS) & elastic recoil detection analysis (ERDA) | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Scanning electron microscope (SEM) with chatodoluminescence (CL) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Scanning electron microscopes (SEM) and transmission electron microscope (TEM) | Centre for Advanced Microscopy | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Surface profilometers - optical | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Characterisation | Surface profilometers - stylus | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Processing | Low and high energy ion implanters (several keVs to several MeVs) | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Processing | Nanoindenters | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Processing | Precision ion polishing system (PIPS), ion beam miller | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | DC/RF magnetron supttering | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Dual frequency plasma enhanced chemical vapour deposition (PECVD) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Metal Organic Chemical Vapour Deposition for III-As, P, Sb, N materials, including nanowires, quantum dots and hBN | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Pulsed laser deposition for oxide-based materials | Research School of Chemistry | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Thermal and plasma-assisted atomic layer deposition | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Barrel etcher | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Chemical-mechanical polishing | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Electron Beam evaporator | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Hot embosser | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Inductively-coupled plasma reactive ion etching (ICP-RIE) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Photolithography: mask aligners and Maskless aligner (MLA) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Rapid thermal processors, furnaces | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Microfabrication and Device Technologies | Thermal evaporator | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Nanofabrication: Two-Dimensional | Dual beam focused ion beam (FIB) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Nanofabrication: Two-Dimensional | Electron beam lithography (EBL) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Nanofabrication: Two-Dimensional | General optical microscope with transfer stage for 2D material dry transfer. | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The Australian National University | Nanofabrication: Two-Dimensional | Nano-imprint lithography (NIL) | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Nanofabrication: Two-Dimensional | High-resolution 125 kV Electron Beam Lithography System | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Optical Characterisation | Confocal, SNOM, AFM, Second harmonic microscope | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The Australian National University | Optical Characterisation | Entangle photon tomography (900-1600 nm) | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The Australian National University | Optical Characterisation | Four transform infrared spectrometer (FTIR) with IR microscope | Research School of Physics | Lan Fu | lan.fu@anu.edu.au |
| The Australian National University | Optical Characterisation | FTIR microspectrometer, Hyperion 2000 | Research School of Physics | Lan Fu | lan.fu@anu.edu.au |
| The Australian National University | Optical Characterisation | Micro polarisation characterisation | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The Australian National University | Optical Characterisation | Micro Transmission / Reflection spectroscopy | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The Australian National University | Optical Characterisation | Micro-Raman, micro-photoluminescence | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Optical Characterisation | Reflectivity, transmissivity, photoluminescence excitation (PLE) | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Optical Characterisation | Spectroscopic ellipsometer | Australian National Fabrication Facility, ACT Node | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Optical Characterisation | Time-resovled photoluminescence, micro-photoluminescence (low temperature) | Research School of Physics | Hoe Tan | Hoe.Tan@anu.edu.au |
| The Australian National University | Optical Characterisation | Ultrafast laser system, Chameleon Ultra II with OPO (680-1700 nm) | Research School of Physics | Dragomir | dragomir.neshev@anu.edu.au |
| The University of Melbourne | Optical Characterisation | Optical custom benchtop microscope (VIS) | School of Physics | Ann Roberts | ann.roberts@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Spatial light modulator | School of Physics | Ann Roberts | ann.roberts@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Supercontinuum laser | School of Physics | Ann Roberts | ann.roberts@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Tunable spectral filter (Bandwidth >5 nm) | School of Physics | Ann Roberts | ann.roberts@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Upright and inverted microscopes including extensive polarisation analysis components | School of Physics | Ann Roberts | ann.roberts@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Custom tabletop spectral characterisation set-up (VIS) | School of Physics | Ken Crozier | kenneth.crozier@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | EQE testing set-up (Energetiq LDLS, monochromator, custom microscope) | School of Physics | Ken Crozier | kenneth.crozier@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | FTIR microspectrometer (Perkin Elmer), Janis cryostat, infrared lasers (2.2, 4.5, 8.35 um) | School of Physics | Ken Crozier | kenneth.crozier@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Optical trapping microscope | School of Physics | Ken Crozier | kenneth.crozier@unimelb.edu.au |
| The University of Melbourne | Optical Characterisation | Probe station (Evergreen) and source measure units (Keithley) | School of Physics | Ken Crozier | kenneth.crozier@unimelb.edu.au |
| RMIT University | Device Testing and Packaging | Direct circuit printers | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Electronic and optoelectronic characterisation test stations | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Electronic packaging and interfacing | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Environmental stages (electrical, thermal, cryogenic, and gaseous environments) | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Large-area screen printer | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Micro- and nano-electronic probe stations | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Device Testing and Packaging | Semiconductor parametric analysers | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Atomic force microscope (thin film materials, multimodal capabilities) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Atomic force microscopes (biomaterials and liquid media) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Cryostat (continuous flow) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Four point probe | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Gas sensing laboratories | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | High-precision nanoindenter | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Laser Doppler vibrometers | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Photoluminescence and micro-Raman spectrometer | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Scanning electron microscopes (SEM) | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Spectroscopic ellipsometer | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Super-resolution fluorescence microscopy | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Surface profilometers: stylus and optical | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | Ultraviolet photoelectron spectroscopy (UPS) | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | X-ray diffraction (high-resolution analysis) | RMIT X-Ray Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | X-ray diffraction (rapid analysis) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Characterisation | X-ray photoelectron spectroscopy (XPS) | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Biomaterials functionalisation and bioplotter | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Deep reactive ion etching (DRIE): Silicon Bosch process | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Focussed ion beam system: Ga | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Glove boxes for nanomaterials processing | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | High-temperature annealing furnaces: Contact annealing | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | High-temperature annealing furnaces: Silicon doping | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | High-temperature annealing furnaces: Silicon oxidation | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | High-temperature annealing furnaces: Titanium in-diffusion in lithium niobate | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Inductively-coupled plasma deep reactive ion etching (ICP-RIE) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Laser machining system | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Physical containment Level 2 (PC2) facility for bacterial cell handling | Sir Ian Potter NanoBioSensing Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Physical containment Level 2 (PC2) facility for mammalian cell handling | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Processing | Vacuum and low pressure annealing furnaces | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Low pressure chemical vapour deposition (LPCVD) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Magnetron sputtering systems (DC, pulsed DC, and RF) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Plasma-enhanced atomic layer deposition (ALD) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Plasma-enhanced chemical vapour deposition (PECVD) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Silanisation | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Thermal evaporator | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Vapour deposition systems (chemical and physio-chemical) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Cyclic olefin copolymer (COC) processing | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Microfluidic device fabrication | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Photolithography: Mask aligners with backside alignment and nanoimprint lithography | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Photolithography: Maskless aligner (MLA) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Photolithography: Training and demonstration stations | Micro Nano Teaching Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Polydimethyl siloxane (PDMS) processing | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Wafer bonder | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Microfabrication and Device Technologies | Wet chemical processing for etching, surface treatment, and electroplating | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Focussed ion beam system: He, Ne, and Ga | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Metal and polymer 3D printing: additive and subtractive | Advanced Manufacturing Precinct | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Nanoscale additive manufacturing system | Laboratory of Artificial Intelligence Nanophotonics | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Nanoscale subtractive manufacturing system | Laboratory of Artificial Intelligence Nanophotonics | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Nanoscribe 3D printer | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Three-Dimensional | Transmission electron microscopes (TEM) | RMIT Microscopy and Microanalysis Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Two-Dimensional | Electron beam lithography (EBL) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Nanofabrication: Two-Dimensional | Nano-imprint lithography (NIL) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Optical Characterisation | Microphotospectrometer | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Optical Characterisation | Nanoscale imaging system | Laboratory of Artificial Intelligence Nanophotonics | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Optical Characterisation | Scanning near-field optical microscope (SNOM) | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Optical Characterisation | Terahertz time domain spectrometer | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Stretchable and Wearable Devices | Integration of miniature wireless electronics | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Stretchable and Wearable Devices | Soft electronics fabrication | Micro Nano Research Facility | Sharath Sriram | sharath.sriram@rmit.edu.au |
| RMIT University | Stretchable and Wearable Devices | Soft electronics testing station | Miniaturised Functional Devices Laboratory | Sharath Sriram | sharath.sriram@rmit.edu.au |
| University of Technology Sydney | Electrical characterisation | Hall System (LN)Â | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Electrical characterisation | Probe Station (4 probes) + Parametric Analyser | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Materials Synthesis | NanoSputterer | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | Confocal Raman spectroscopy | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | FT IR microscope | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | a diffuse reflectance FTIR system with environmental chamber called Praying Mantis from ThermoFisher. to study surface-enhanced infrared absorption (SEIRA) for chemical sensing using plasmonics/metasurfaces. | FEIT | Francesca Iacopi | Francesca.Iacopi@uts.edu.au |
| University of Technology Sydney | Materials Characterisation | Scannig probe microscopy | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Processing | Beam-directed surface functionalization | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Processing | Direct-write electron & ion beam-induced etching | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Processing | Optical and electron beam lithography | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Processing | Reactive ion etching | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Synthesis | HT Tube Furnace | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Synthesis: Nanostructures | Direct-write electron/ion beam-directed growth of nanostructes | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Synthesis: Nanostructures | Growth of diamond | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Materials Synthesis: Thin Films and Two-Dimensional Materials | Growth and wet/dry trasfer of 2D materials | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Microfabrication and Device Technologies | Device fabrication from 2D and 3D materials | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | Confocal photoluminescence spectroscopy (room temperature, high temperature, cryogenic, controlled gaseous environments) | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | ODMR | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| University of Technology Sydney | Optical Characterisation | Photon correlation analysis; characterisation of single photon emitters | Science | Igor Aharonovich or Milos Toth | igor.aharonovich@uts.edu.au; milos.toth@uts.edu.au |
| The University of Western Australia | 15 Tesla superconducting cryogenic magnet system | Measures the carrier concentration and mobility of semiconductor samples at various temperatures using the Hall Effect | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | 4Wave LANS DC Sputter Coater | Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Anealsys AS-One 150 RTA | A cold wall bench top rapid thermal processor, to provide high cooling rates and low memory effect of the process chamber. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Custom Dual Chamber Thermal Evaporator | Custom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Custom Indium Thermal Evaporator | Thermal evaporator designed for Indium deposition (In dedicated) | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Custom infrared/visible spectroscopy system | Provides 2-D surface mapping of infrared transmission of thin film filters. Also used for light beam induced current measurements on semiconductor samples. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Custom IR characterisation system | IR transmission/reflection system to characterise spectrometer/filter performance | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Custom Zinc Sulfide Thermal Evaporator | Thermal evaporator designed for Zinc Sulfide deposition | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Disco DAD 3240 | Dices semiconductor sample wafers | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Edwards Auto 500 E-beam Evaporator | Ability to deposit ultra pure films of materials with high melting points and other materials that are difficult to deposit by resistance thermal evaporation. The tool allows thick film deposition and also multiple coatings. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | EVG 105 Bake Module | Softbake, post-exposure bake and hardbake processes. Programmable proximity pins and nitrogen overflow provide control of resist hardening processes and temperature profiles. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | F&S Bondtec ball bonder | Semi-automated gold wire bonding station | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Finetech Fineplacer-96 flip-chip bonder | Manual flip-chip bonder with high accuracy of 0.5 ?m. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Gooch and Housego OL 750 Spectroradiometric Measurement System | Measures the electrical output per optical input of photodetectors. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Keithley 4200A-SCS parameter analyzer | All-in-one unit, that consists of power supplies, voltage meters, current meters, switching matrices and LCR meters to test semiconductors devices | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Labec HTF 60 annealing furnace | Anneals semiconductor samples at high temperatures | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | March Instruments PM-600 barrel plasma asher | Oxygen plasma etcher/asher. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Olympus LEXT OLS5000 3D Microscope | Provides sub-micron 3D observation/measurement of surface topography with the ability to compare very rough surface shapes. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Optronic Laboratories Inc. OL 480 Blackbody Source | Emits blackbody radiation for characterizing responsitivity of photodetectors | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Oxford Instruments Plasmalab100 ICPRIE | Inductively coupled plasma reactive ion etcher | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Oxford Instruments Plasmalab80 plus ICPCVD | Thin film deposition via Incuctively Coupled Plasma Enhanced Chemical Vapour Deposition (ICPCVD) | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Perkin Elmer Spotlight 200i Fourier trnasform infrared spectroscopy (FTIR) microscope | IR transmission/reflection system to characterise spectrometer/filter performance | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Powatec U-200 UV curing system | Performs UV curing of samples | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Pulse Instruments 7700 | Characterizes the imaging performance of infrared arrays | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Riber 32P Molecular Beam Epitaxy System | Versatile tool that epitaxially deposits precise amounts of material onto substrates. Often used to design and create semiconductor structures for manufacturing many novel devices. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Rucker & Kolls 680A Prober | Probe station with B&L Microzoom | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Scientific Vacuum Systems V6000 E-beam Evaporator | Ability to deposit ultra pure films of materials with high melting points and other materials that are difficult to deposit by resistance thermal evaporation. The tool allows thick film deposition and also multiple coatings. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Sentech SI 500D ICPCVD | Thin film deposition via Incuctively Coupled Plasma Enhanced Chemical Vapour Deposition (ICPCVD). Variable plasma properties providing high density, low ion energy, and low pressure plasma deposition of dielectric films. A large variety of substrates from wafers up to 200?mm diameter to parts loaded on carriers can be processed. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Suss MicroTek MA6 mask aligner | Contact mask aligner system to perform precision mask-to-wafer front- or back-side alignment | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | UniTemp RVS-210 Indium reflow system | Used to reflow Indium bumps into balls for flip-chip bonding | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Veeco Dektak 150 stylus profiler | Measures thin film thickness, stress, surface roughness and form | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Vermes MDC 3200+ microdispenser | Dispenses droplets of a wide variety of fluids with a diameter of less than 150 micrometers on substrates | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Wollam M-2000 ellipsometer | Measure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Zygo NewView6300 | Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Tousimis critical point dryer | Automatic supercritical point dryer | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
| The University of Western Australia | Filmetrics F10-RT thin film analyser | Simultaneous reflectance/transmittance measurement for characterisation of thin film thickness and refractive index. | Australian National Fabrication Facility, WA Node | Mariusz Martyniuk | mariusz.martyniuk@uwa.edu.au |
