The Australian National University | Device Testing and Packaging | Blackbody source for MIR photodetector characterisaion | Electronic Materials Engineering |
The Australian National University | Device Testing and Packaging | Laser diode test bench, inclduing laser diode scriber | Electronic Materials Engineering |
The Australian National University | Device Testing and Packaging | Quantum efficiency measurement system | Electronic Materials Engineering |
The Australian National University | Device Testing and Packaging | Solar simulator | Electronic Materials Engineering |
The Australian National University | Device Testing and Packaging | Wire bonders and flip chip bonder | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Characterisation | Atomic force microscope (AFM) | Electronic Materials Engineering |
The Australian National University | Materials Characterisation | Hall effect, deep level transient spectroscopy (DLTS), I-V, C-V, four-point probe | Electronic Materials Engineering |
The Australian National University | Materials Characterisation | Hi-resolution x-ray diffraction (XRD) | Electronic Materials Engineering |
The Australian National University | Materials Characterisation | Photoelectrochemical setup | Electronic Materials Engineering |
The Australian National University | Materials Characterisation | Rutherford backscattering spectrometry (RBS) & elastic recoil detection analysis (ERDA) | Electronic Materials Engineering |
The Australian National University | Materials Characterisation | Scanning electron microscope (SEM) with chatodoluminescence (CL) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Characterisation | Scanning electron microscopes (SEM) and transmission electron microscope (TEM) | Centre for Advanced Microscopy |
The Australian National University | Materials Characterisation | Surface profilometers - optical | Laser Physics Centre |
The Australian National University | Materials Characterisation | Surface profilometers - stylus | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Processing | Low and high energy ion implanters (several keVs to several MeVs) | Electronic Materials Engineering |
The Australian National University | Materials Processing | Nanoindenters | Electronic Materials Engineering |
The Australian National University | Materials Processing | Precision ion polishing system (PIPS), ion beam miller | Electronic Materials Engineering |
The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | DC/RF magnetron supttering | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Dual frequency plasma enhanced chemical vapour deposition (PECVD) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Metal Organic Chemical Vapour Deposition for III-As, P, Sb, N materials, including nanowires, quantum dots and hBN | Australian National Fabrication Facility, ACT Node |
The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Pulsed laser deposition for oxide-based materials | Electronic Materials Engineering |
The Australian National University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Thermal and plasma-assisted atomic layer deposition | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Barrel etcher | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Chemical-mechanical polishing | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Electron Beam evaporator | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Hot embosser | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Inductively-coupled plasma reactive ion etching (ICP-RIE) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Mask aligners for photolithography | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Rapid thermal processors, furnaces | Australian National Fabrication Facility, ACT Node |
The Australian National University | Microfabrication and Device Technologies | Thermal evaporator | Australian National Fabrication Facility, ACT Node |
The Australian National University | Nanofabrication: Two-Dimensional | Dual beam focused ion beam (FIB) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Nanofabrication: Two-Dimensional | Electron beam lithography (EBL) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Nanofabrication: Two-Dimensional | General optical microscope with transfer stage for 2D material dry transfer. | Research School of Physics |
The Australian National University | Nanofabrication: Two-Dimensional | Nano-imprint lithography (NIL) | Australian National Fabrication Facility, ACT Node |
The Australian National University | Optical Characterisation | Confocal, SNOM, AFM, Second harmonic microscope | Nonlinear Physics Centre |
The Australian National University | Optical Characterisation | Entangle photon tomography (900-1600 nm) | Nonlinear Physics Centre |
The Australian National University | Optical Characterisation | Four transform infrared spectrometer (FTIR) with IR microscope | Electronic Materials Engineering |
The Australian National University | Optical Characterisation | FTIR microspectrometer, Hyperion 2000 | Research School of Physics |
The Australian National University | Optical Characterisation | Micro polarisation characterisation | Nonlinear Physics Centre |
The Australian National University | Optical Characterisation | Micro Transmission / Reflection spectroscopy | Nonlinear Physics Centre |
The Australian National University | Optical Characterisation | Micro-Raman, micro-photoluminescence | Electronic Materials Engineering |
The Australian National University | Optical Characterisation | Reflectivity, transmissivity, photoluminescence excitation (PLE) | Electronic Materials Engineering |
The Australian National University | Optical Characterisation | Spectroscopic ellipsometer | Australian National Fabrication Facility, ACT Node |
The Australian National University | Optical Characterisation | Time-resovled photoluminescence, micro-photoluminescence (low temperature) | Electronic Materials Engineering |
The Australian National University | Optical Characterisation | Ultrafast laser system, Chameleon Ultra II with OPO (680-1700 nm) | Research School of Physics |
The University of Melbourne | Optical Characterisation | Custom tabletop spectral characterisation set-up (VIS) | School of Physics |
The University of Melbourne | Optical Characterisation | EQE testing set-up (Energetiq LDLS, monochromator, custom microscope) | School of Physics |
The University of Melbourne | Optical Characterisation | FTIR microspectrometer (Perkin Elmer), Janis cryostat, infrared lasers (2.2, 4.5, 8.35 um) | School of Physics |
The University of Melbourne | Optical Characterisation | Optical custom benchtop microscope (VIS) | School of Physics |
The University of Melbourne | Optical Characterisation | Optical trapping microscope | School of Physics |
The University of Melbourne | Optical Characterisation | Probe station (Evergreen) and source measure units (Keithley) | School of Physics |
The University of Melbourne | Optical Characterisation | Spatial light modulator | School of Physics |
The University of Melbourne | Optical Characterisation | Supercontinuum laser | School of Physics |
The University of Melbourne | Optical Characterisation | Tunable spectral filter (Bandwidth >5 nm) | School of Physics |
The University of Melbourne | Optical Characterisation | Upright and inverted microscopes including extensive polarisation analysis components | School of Physics |
RMIT University | Device Testing and Packaging | Direct circuit printers | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Electronic and optoelectronic characterisation test stations | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Electronic packaging and interfacing | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Environmental stages (electrical, thermal, cryogenic, and gaseous environments) | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Large-area screen printer | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Micro- and nano-electronic probe stations | Miniaturised Functional Devices Laboratory |
RMIT University | Device Testing and Packaging | Semiconductor parametric analysers | Miniaturised Functional Devices Laboratory |
RMIT University | Materials Characterisation | Atomic force microscope (thin film materials, multimodal capabilities) | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Atomic force microscopes (biomaterials and liquid media) | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Cryostat (continuous flow) | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Four point probe | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Gas sensing laboratories | Micro Nano Research Facility |
RMIT University | Materials Characterisation | High-precision nanoindenter | RMIT Microscopy and Microanalysis Facility |
RMIT University | Materials Characterisation | Laser Doppler vibrometers | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Photoluminescence and micro-Raman spectrometer | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Scanning electron microscopes (SEM) | RMIT Microscopy and Microanalysis Facility |
RMIT University | Materials Characterisation | Spectroscopic ellipsometer | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Super-resolution fluorescence microscopy | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Surface profilometers: stylus and optical | Micro Nano Research Facility |
RMIT University | Materials Characterisation | Ultraviolet photoelectron spectroscopy (UPS) | RMIT Microscopy and Microanalysis Facility |
RMIT University | Materials Characterisation | X-ray diffraction (high-resolution analysis) | RMIT X-Ray Facility |
RMIT University | Materials Characterisation | X-ray diffraction (rapid analysis) | Micro Nano Research Facility |
RMIT University | Materials Characterisation | X-ray photoelectron spectroscopy (XPS) | RMIT Microscopy and Microanalysis Facility |
RMIT University | Materials Processing | Biomaterials functionalisation and bioplotter | Micro Nano Research Facility |
RMIT University | Materials Processing | Deep reactive ion etching (DRIE): Silicon Bosch process | Micro Nano Research Facility |
RMIT University | Materials Processing | Focussed ion beam system: Ga | RMIT Microscopy and Microanalysis Facility |
RMIT University | Materials Processing | Glove boxes for nanomaterials processing | Micro Nano Research Facility |
RMIT University | Materials Processing | High-temperature annealing furnaces: Contact annealing | Micro Nano Research Facility |
RMIT University | Materials Processing | High-temperature annealing furnaces: Silicon doping | Micro Nano Research Facility |
RMIT University | Materials Processing | High-temperature annealing furnaces: Silicon oxidation | Micro Nano Research Facility |
RMIT University | Materials Processing | High-temperature annealing furnaces: Titanium in-diffusion in lithium niobate | Micro Nano Research Facility |
RMIT University | Materials Processing | Inductively-coupled plasma deep reactive ion etching (ICP-RIE) | Micro Nano Research Facility |
RMIT University | Materials Processing | Laser machining system | Micro Nano Research Facility |
RMIT University | Materials Processing | Physical containment Level 2 (PC2) facility for bacterial cell handling | Sir Ian Potter NanoBioSensing Facility |
RMIT University | Materials Processing | Physical containment Level 2 (PC2) facility for mammalian cell handling | Micro Nano Research Facility |
RMIT University | Materials Processing | Vacuum and low pressure annealing furnaces | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Low pressure chemical vapour deposition (LPCVD) | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Magnetron sputtering systems (DC, pulsed DC, and RF) | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Plasma-enhanced atomic layer deposition (ALD) | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Plasma-enhanced chemical vapour deposition (PECVD) | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Silanisation | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Thermal evaporator | Micro Nano Research Facility |
RMIT University | Materials Synthesis: Thin Films and Two-Dimensional Materials | Vapour deposition systems (chemical and physio-chemical) | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Cyclic olefin copolymer (COC) processing | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Microfluidic device fabrication | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Photolithography: Mask aligners with backside alignment and nanoimprint lithography | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Photolithography: Maskless aligner (MLA) | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Photolithography: Training and demonstration stations | Micro Nano Teaching Facility |
RMIT University | Microfabrication and Device Technologies | Polydimethyl siloxane (PDMS) processing | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Wafer bonder | Micro Nano Research Facility |
RMIT University | Microfabrication and Device Technologies | Wet chemical processing for etching, surface treatment, and electroplating | Micro Nano Research Facility |
RMIT University | Nanofabrication: Three-Dimensional | Focussed ion beam system: He, Ne, and Ga | Micro Nano Research Facility |
RMIT University | Nanofabrication: Three-Dimensional | Metal and polymer 3D printing: additive and subtractive | Advanced Manufacturing Precinct |
RMIT University | Nanofabrication: Three-Dimensional | Nanoscale additive manufacturing system | Laboratory of Artificial Intelligence Nanophotonics |
RMIT University | Nanofabrication: Three-Dimensional | Nanoscale subtractive manufacturing system | Laboratory of Artificial Intelligence Nanophotonics |
RMIT University | Nanofabrication: Three-Dimensional | Nanoscribe 3D printer | Micro Nano Research Facility |
RMIT University | Nanofabrication: Three-Dimensional | Transmission electron microscopes (TEM) | RMIT Microscopy and Microanalysis Facility |
RMIT University | Nanofabrication: Two-Dimensional | Electron beam lithography (EBL) | Micro Nano Research Facility |
RMIT University | Nanofabrication: Two-Dimensional | Nano-imprint lithography (NIL) | Micro Nano Research Facility |
RMIT University | Optical Characterisation | Microphotospectrometer | Micro Nano Research Facility |
RMIT University | Optical Characterisation | Nanoscale imaging system | Laboratory of Artificial Intelligence Nanophotonics |
RMIT University | Optical Characterisation | Scanning near-field optical microscope (SNOM) | Micro Nano Research Facility |
RMIT University | Optical Characterisation | Terahertz time domain spectrometer | Micro Nano Research Facility |
RMIT University | Stretchable and Wearable Devices | Integration of miniature wireless electronics | Miniaturised Functional Devices Laboratory |
RMIT University | Stretchable and Wearable Devices | Soft electronics fabrication | Micro Nano Research Facility |
RMIT University | Stretchable and Wearable Devices | Soft electronics testing station | Miniaturised Functional Devices Laboratory |
University of Technology Sydney | Electrical characterisation | Hall System (LN)Â | FEIT |
University of Technology Sydney | Electrical characterisation | Probe Station (4 probes) + Parametric Analyser | FEIT |
University of Technology Sydney | Materials Characterisation | Scannig probe microscopy | Science |
University of Technology Sydney | Materials Processing | Beam-directed surface functionalization | Science |
University of Technology Sydney | Materials Processing | Direct-write electron & ion beam-induced etching | Science |
University of Technology Sydney | Materials Processing | Optical and electron beam lithography | Science |
University of Technology Sydney | Materials Processing | Reactive ion etching | Science |
University of Technology Sydney | Materials Synthesis | HT Tube Furnace | Science |
University of Technology Sydney | Materials Synthesis | NanoSputterer | FEIT |
University of Technology Sydney | Materials Synthesis: Nanostructures | Direct-write electron/ion beam-directed growth of nanostructes | Science |
University of Technology Sydney | Materials Synthesis: Nanostructures | Growth of diamond | Science |
University of Technology Sydney | Materials Synthesis: Thin Films and Two-Dimensional Materials | Growth and wet/dry trasfer of 2D materials | Science |
University of Technology Sydney | Microfabrication and Device Technologies | Device fabrication from 2D and 3D materials | Science |
University of Technology Sydney | Optical Characterisation | Confocal photoluminescence spectroscopy (room temperature, high temperature, cryogenic, controlled gaseous environments) | Science |
University of Technology Sydney | Optical Characterisation | Confocal Raman spectroscopy | FEIT |
University of Technology Sydney | Optical Characterisation | ODMR | Science |
University of Technology Sydney | Optical Characterisation | Photon correlation analysis; characterisation of single photon emitters | Science |
University of Technology Sydney | Optical Characterisation | FT IR microscope | FEIT |
University of Technology Sydney | Optical Characterisation | a diffuse reflectance FTIR system with environmental chamber called Praying Mantis from ThermoFisher. to study surface-enhanced infrared absorption (SEIRA) for chemical sensing using plasmonics/metasurfaces. | FEIT |
The University of Western Australia | Annealing | A cold wall bench top rapid thermal processor, to provide high cooling rates and low memory effect of the process chamber [category : Material modification] | Microelectronics Research Group |
The University of Western Australia | Cryostat IR array characterisation system | IR transmission/reflection system to characterise spectrometer/filter performance [category : Spectroscopy] | Microelectronics Research Group |
The University of Western Australia | Deep-level transient spectroscopy | Characterisation of semiconductor bandgap energy levels using deep-level transient spectroscopy (DLTS) [category : Spectroscopy] | Microelectronics Research Group |
The University of Western Australia | Electron Beam Evaporation (E-Beam Evaporation) | Ability to deposit ultra pure films of materials with high melting points, and other materials that are difficult to deposit by resistance evaporation. The tool allows thick film deposition and also multiple coatings. [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Hall effect measurement system | 2T electromagnet to perform Hall effect measurements [category : Electrical Characterisation] | Microelectronics Research Group |
The University of Western Australia | Laser Beam Induced Current (LBIC) Scanning Laser Microscopy | Mapping of material quality and device performance using a laser induced current [category : Electrical Characterisation] | Microelectronics Research Group |
The University of Western Australia | Laser Doppler Vibrometer | Non-contact vibration analysis commonly used to characterise MEMS devices [category : Vibrometry] | Microelectronics Research Group |
The University of Western Australia | Optical microscopy | Provides sub-micron 3D observation/measurement with the ability to compare very rough surface shapes [category : Microscopy] | Microelectronics Research Group |
The University of Western Australia | Optical profilometer | Non-contact 3D scanning white light and optical phase-shifting interferometer. [category : Profilometry] | Microelectronics Research Group |
The University of Western Australia | Plasma Enhanced Chemical Vaoupr Deposition (PECVD) | Variable plasma properties providing high density, low ion energy, and low pressure plasma deposition of dielectric films. Low stress plasma chemical vapour deposition of low-stress films to satisfy mechanical requirement of MEMS devices. A large variety of substrates from wafers up to 200 mm diameter to parts loaded on carriers can be processed [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Reactive Ion Etching (RIE) | System for plasma enhanced chemical vapour deposition system (PECVD) and reactive ion etching (RIE) [category : Etching] | Microelectronics Research Group |
The University of Western Australia | Riber 32B Molecular Beam Epitaxy System | Versatile tool that deposits amounts of material onto substrates. Often used to design and create semiconductor structures for manufacturing many novel devices [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Semi-automatic wafer probe station | Probe station with B&L Microzoon [category : Electrical Characterisation] | Microelectronics Research Group |
The University of Western Australia | Semiconductor parameter analyser | Digital sweep parameter. Used for failture analysis and automated incoming inspection [category : Electrical Characterisation] | Microelectronics Research Group |
The University of Western Australia | Spin coating and wafer development | Softbake, post-exposure bake and hardbake processes. [category : Lithography] | Microelectronics Research Group |
The University of Western Australia | Sputtering using 4Wave The Laboratory Alloy and Nanolayer System (LANS) | Provides atomically engineered thin films and inerfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Thermal evaporation | Thermal evaporator designed for Zinc Sulfide deposition [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Thermal evaporation | Custom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity [category : Deposition] | Microelectronics Research Group |
The University of Western Australia | Wafer Bonding | Manual flip chip bonder with high accurace of 0.5 µm [category : Bonding] | Microelectronics Research Group |
The University of Western Australia | Wedge Bonder | Manual wedge bonder, simple set-up and incorporates analogue controls for ease of use. This allows rapid admustment of individual bonding parameters [category : Bonding] | Microelectronics Research Group |