Capabilities and Facilities

NODE	TYPE	DESCRIPTION	LOCATION (IF APPLICABLE)
The Australian National University	Device Testing and Packaging	Blackbody source for MIR photodetector characterisaion	Electronic Materials Engineering
The Australian National University	Device Testing and Packaging	Laser diode test bench, inclduing laser diode scriber	Electronic Materials Engineering
The Australian National University	Device Testing and Packaging	Quantum efficiency measurement system	Electronic Materials Engineering
The Australian National University	Device Testing and Packaging	Solar simulator	Electronic Materials Engineering
The Australian National University	Device Testing and Packaging	Wire bonders and flip chip bonder	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Characterisation	Atomic force microscope (AFM)	Electronic Materials Engineering
The Australian National University	Materials Characterisation	Hall effect, deep level transient spectroscopy (DLTS), I-V, C-V, four-point probe	Electronic Materials Engineering
The Australian National University	Materials Characterisation	Hi-resolution x-ray diffraction (XRD)	Electronic Materials Engineering
The Australian National University	Materials Characterisation	Photoelectrochemical setup	Electronic Materials Engineering
The Australian National University	Materials Characterisation	Rutherford backscattering spectrometry (RBS) & elastic recoil detection analysis (ERDA)	Electronic Materials Engineering
The Australian National University	Materials Characterisation	Scanning electron microscope (SEM) with chatodoluminescence (CL)	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Characterisation	Scanning electron microscopes (SEM) and transmission electron microscope (TEM)	Centre for Advanced Microscopy
The Australian National University	Materials Characterisation	Surface profilometers - optical	Laser Physics Centre
The Australian National University	Materials Characterisation	Surface profilometers - stylus	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Processing	Low and high energy ion implanters (several keVs to several MeVs)	Electronic Materials Engineering
The Australian National University	Materials Processing	Nanoindenters	Electronic Materials Engineering
The Australian National University	Materials Processing	Precision ion polishing system (PIPS), ion beam miller	Electronic Materials Engineering
The Australian National University	Materials Synthesis: Thin Films and Two-Dimensional Materials	DC/RF magnetron supttering	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Dual frequency plasma enhanced chemical vapour deposition (PECVD)	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Metal Organic Chemical Vapour Deposition for III-As, P, Sb, N materials, including nanowires, quantum dots and hBN	Australian National Fabrication Facility, ACT Node
The Australian National University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Pulsed laser deposition for oxide-based materials	Electronic Materials Engineering
The Australian National University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Thermal and plasma-assisted atomic layer deposition	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Barrel etcher	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Chemical-mechanical polishing	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Electron Beam evaporator	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Hot embosser	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Inductively-coupled plasma reactive ion etching (ICP-RIE)	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Mask aligners for photolithography	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Rapid thermal processors, furnaces	Australian National Fabrication Facility, ACT Node
The Australian National University	Microfabrication and Device Technologies	Thermal evaporator	Australian National Fabrication Facility, ACT Node
The Australian National University	Nanofabrication: Two-Dimensional	Dual beam focused ion beam (FIB)	Australian National Fabrication Facility, ACT Node
The Australian National University	Nanofabrication: Two-Dimensional	Electron beam lithography (EBL)	Australian National Fabrication Facility, ACT Node
The Australian National University	Nanofabrication: Two-Dimensional	General optical microscope with transfer stage for 2D material dry transfer.	Research School of Physics
The Australian National University	Nanofabrication: Two-Dimensional	Nano-imprint lithography (NIL)	Australian National Fabrication Facility, ACT Node
The Australian National University	Optical Characterisation	Confocal, SNOM, AFM, Second harmonic microscope	Nonlinear Physics Centre
The Australian National University	Optical Characterisation	Entangle photon tomography (900-1600 nm)	Nonlinear Physics Centre
The Australian National University	Optical Characterisation	Four transform infrared spectrometer (FTIR) with IR microscope	Electronic Materials Engineering
The Australian National University	Optical Characterisation	FTIR microspectrometer, Hyperion 2000	Research School of Physics
The Australian National University	Optical Characterisation	Micro polarisation characterisation	Nonlinear Physics Centre
The Australian National University	Optical Characterisation	Micro Transmission / Reflection spectroscopy	Nonlinear Physics Centre
The Australian National University	Optical Characterisation	Micro-Raman, micro-photoluminescence	Electronic Materials Engineering
The Australian National University	Optical Characterisation	Reflectivity, transmissivity, photoluminescence excitation (PLE)	Electronic Materials Engineering
The Australian National University	Optical Characterisation	Spectroscopic ellipsometer	Australian National Fabrication Facility, ACT Node
The Australian National University	Optical Characterisation	Time-resovled photoluminescence, micro-photoluminescence (low temperature)	Electronic Materials Engineering
The Australian National University	Optical Characterisation	Ultrafast laser system, Chameleon Ultra II with OPO (680-1700 nm)	Research School of Physics
The University of Melbourne	Optical Characterisation	Custom tabletop spectral characterisation set-up (VIS)	School of Physics
The University of Melbourne	Optical Characterisation	EQE testing set-up (Energetiq LDLS, monochromator, custom microscope)	School of Physics
The University of Melbourne	Optical Characterisation	FTIR microspectrometer (Perkin Elmer), Janis cryostat, infrared lasers (2.2, 4.5, 8.35 um)	School of Physics
The University of Melbourne	Optical Characterisation	Optical custom benchtop microscope (VIS)	School of Physics
The University of Melbourne	Optical Characterisation	Optical trapping microscope	School of Physics
The University of Melbourne	Optical Characterisation	Probe station (Evergreen) and source measure units (Keithley)	School of Physics
The University of Melbourne	Optical Characterisation	Spatial light modulator	School of Physics
The University of Melbourne	Optical Characterisation	Supercontinuum laser	School of Physics
The University of Melbourne	Optical Characterisation	Tunable spectral filter (Bandwidth >5 nm)	School of Physics
The University of Melbourne	Optical Characterisation	Upright and inverted microscopes including extensive polarisation analysis components	School of Physics
RMIT University	Device Testing and Packaging	Direct circuit printers	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Electronic and optoelectronic characterisation test stations	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Electronic packaging and interfacing	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Environmental stages (electrical, thermal, cryogenic, and gaseous environments)	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Large-area screen printer	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Micro- and nano-electronic probe stations	Miniaturised Functional Devices Laboratory
RMIT University	Device Testing and Packaging	Semiconductor parametric analysers	Miniaturised Functional Devices Laboratory
RMIT University	Materials Characterisation	Atomic force microscope (thin film materials, multimodal capabilities)	Micro Nano Research Facility
RMIT University	Materials Characterisation	Atomic force microscopes (biomaterials and liquid media)	Micro Nano Research Facility
RMIT University	Materials Characterisation	Cryostat (continuous flow)	Micro Nano Research Facility
RMIT University	Materials Characterisation	Four point probe	Micro Nano Research Facility
RMIT University	Materials Characterisation	Gas sensing laboratories	Micro Nano Research Facility
RMIT University	Materials Characterisation	High-precision nanoindenter	RMIT Microscopy and Microanalysis Facility
RMIT University	Materials Characterisation	Laser Doppler vibrometers	Micro Nano Research Facility
RMIT University	Materials Characterisation	Photoluminescence and micro-Raman spectrometer	Micro Nano Research Facility
RMIT University	Materials Characterisation	Scanning electron microscopes (SEM)	RMIT Microscopy and Microanalysis Facility
RMIT University	Materials Characterisation	Spectroscopic ellipsometer	Micro Nano Research Facility
RMIT University	Materials Characterisation	Super-resolution fluorescence microscopy	Micro Nano Research Facility
RMIT University	Materials Characterisation	Surface profilometers: stylus and optical	Micro Nano Research Facility
RMIT University	Materials Characterisation	Ultraviolet photoelectron spectroscopy (UPS)	RMIT Microscopy and Microanalysis Facility
RMIT University	Materials Characterisation	X-ray diffraction (high-resolution analysis)	RMIT X-Ray Facility
RMIT University	Materials Characterisation	X-ray diffraction (rapid analysis)	Micro Nano Research Facility
RMIT University	Materials Characterisation	X-ray photoelectron spectroscopy (XPS)	RMIT Microscopy and Microanalysis Facility
RMIT University	Materials Processing	Biomaterials functionalisation and bioplotter	Micro Nano Research Facility
RMIT University	Materials Processing	Deep reactive ion etching (DRIE): Silicon Bosch process	Micro Nano Research Facility
RMIT University	Materials Processing	Focussed ion beam system: Ga	RMIT Microscopy and Microanalysis Facility
RMIT University	Materials Processing	Glove boxes for nanomaterials processing	Micro Nano Research Facility
RMIT University	Materials Processing	High-temperature annealing furnaces: Contact annealing	Micro Nano Research Facility
RMIT University	Materials Processing	High-temperature annealing furnaces: Silicon doping	Micro Nano Research Facility
RMIT University	Materials Processing	High-temperature annealing furnaces: Silicon oxidation	Micro Nano Research Facility
RMIT University	Materials Processing	High-temperature annealing furnaces: Titanium in-diffusion in lithium niobate	Micro Nano Research Facility
RMIT University	Materials Processing	Inductively-coupled plasma deep reactive ion etching (ICP-RIE)	Micro Nano Research Facility
RMIT University	Materials Processing	Laser machining system	Micro Nano Research Facility
RMIT University	Materials Processing	Physical containment Level 2 (PC2) facility for bacterial cell handling	Sir Ian Potter NanoBioSensing Facility
RMIT University	Materials Processing	Physical containment Level 2 (PC2) facility for mammalian cell handling	Micro Nano Research Facility
RMIT University	Materials Processing	Vacuum and low pressure annealing furnaces	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Low pressure chemical vapour deposition (LPCVD)	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Magnetron sputtering systems (DC, pulsed DC, and RF)	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Plasma-enhanced atomic layer deposition (ALD)	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Plasma-enhanced chemical vapour deposition (PECVD)	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Silanisation	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Thermal evaporator	Micro Nano Research Facility
RMIT University	Materials Synthesis: Thin Films and Two-Dimensional Materials	Vapour deposition systems (chemical and physio-chemical)	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Cyclic olefin copolymer (COC) processing	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Microfluidic device fabrication	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Photolithography: Mask aligners with backside alignment and nanoimprint lithography	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Photolithography: Maskless aligner (MLA)	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Photolithography: Training and demonstration stations	Micro Nano Teaching Facility
RMIT University	Microfabrication and Device Technologies	Polydimethyl siloxane (PDMS) processing	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Wafer bonder	Micro Nano Research Facility
RMIT University	Microfabrication and Device Technologies	Wet chemical processing for etching, surface treatment, and electroplating	Micro Nano Research Facility
RMIT University	Nanofabrication: Three-Dimensional	Focussed ion beam system: He, Ne, and Ga	Micro Nano Research Facility
RMIT University	Nanofabrication: Three-Dimensional	Metal and polymer 3D printing: additive and subtractive	Advanced Manufacturing Precinct
RMIT University	Nanofabrication: Three-Dimensional	Nanoscale additive manufacturing system	Laboratory of Artificial Intelligence Nanophotonics
RMIT University	Nanofabrication: Three-Dimensional	Nanoscale subtractive manufacturing system	Laboratory of Artificial Intelligence Nanophotonics
RMIT University	Nanofabrication: Three-Dimensional	Nanoscribe 3D printer	Micro Nano Research Facility
RMIT University	Nanofabrication: Three-Dimensional	Transmission electron microscopes (TEM)	RMIT Microscopy and Microanalysis Facility
RMIT University	Nanofabrication: Two-Dimensional	Electron beam lithography (EBL)	Micro Nano Research Facility
RMIT University	Nanofabrication: Two-Dimensional	Nano-imprint lithography (NIL)	Micro Nano Research Facility
RMIT University	Optical Characterisation	Microphotospectrometer (UVâVisâNIR)	Micro Nano Research Facility
RMIT University	Optical Characterisation	Nanoscale imaging system	Laboratory of Artificial Intelligence Nanophotonics
RMIT University	Optical Characterisation	Scanning near-field optical microscope (SNOM)	Micro Nano Research Facility
RMIT University	Optical Characterisation	Terahertz time domain spectrometer	Micro Nano Research Facility
RMIT University	Stretchable and Wearable Devices	Integration of miniature wireless electronics	Miniaturised Functional Devices Laboratory
RMIT University	Stretchable and Wearable Devices	Soft electronics fabrication	Micro Nano Research Facility
RMIT University	Stretchable and Wearable Devices	Soft electronics testing station	Miniaturised Functional Devices Laboratory
University of Technology Sydney	Materials Characterisation	Scannig probe microscopy	Science
University of Technology Sydney	Materials Processing	Beam-directed surface functionalization	Science
University of Technology Sydney	Materials Processing	Direct-write electron & ion beam-induced etching	Science
University of Technology Sydney	Materials Processing	Optical and electron beam lithography	Science
University of Technology Sydney	Materials Processing	Reactive ion etching	Science
University of Technology Sydney	Materials Synthesis: Nanostructures	Direct-write electron/ion beam-directed growth of nanostructes	Science
University of Technology Sydney	Materials Synthesis: Nanostructures	Growth of diamond	Science
University of Technology Sydney	Materials Synthesis: Thin Films and Two-Dimensional Materials	Growth and wet/dry trasfer of 2D materials	Science
University of Technology Sydney	Microfabrication and Device Technologies	Device fabrication from 2D and 3D materials	Science
University of Technology Sydney	Optical Characterisation	Confocal photoluminescence spectroscopy (room temperature, high temperature, cryogenic, controlled gaseous environments)	Science
University of Technology Sydney	Optical Characterisation	Confocal Raman spectroscopy	FEIT
University of Technology Sydney	Optical Characterisation	ODMR	Science
University of Technology Sydney	Optical Characterisation	Photon correlation analysis; characterisation of single photon emitters	Science
The University of Western Australia	Materials Synthesis: Thin Films and Two-Dimensional Materials	Molecular beam epitaxy	Microelectronics Research Group
The University of Western Australia	Sputtering using 4Wave The Laboratory Alloy and Nanolayer System (LANS)	Provides atomically engineered thin films and inerfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability	Microelectronics Research Group
The University of Western Australia	Cryostat IR array characterisation system	IR transmission/reflection system to characterise spectrometer/filter performance	Microelectronics Research Group
The University of Western Australia	Deep-level transient spectroscopy	Characterisation of semiconductor bandgap energy levels using deep-level transient spectroscopy (DLTS)	Microelectronics Research Group
The University of Western Australia	Wedge Bonder	Manual wedge bonder, simple set-up and incorporates analogue controls for ease of use. This allows rapid admustment of individual bonding parameters	Microelectronics Research Group
The University of Western Australia	Laser Doppler Vibrometer	Non-contact vibration analysis commonly used to characterise MEMS devices	Microelectronics Research Group
The University of Western Australia	Riber 32B Molecular Beam Epitaxy System	Versatile tool that deposits amounts of material onto substrates. Often used to design and create semiconductor structures for manufacturing many novel devices	Microelectronics Research Group
The University of Western Australia	Optical profilometer	Non-contact 3D scanning white light and optical phase-shifting interferometer.	Microelectronics Research Group
The University of Western Australia	Plasma Enhanced Chemical Vaoupr Deposition (PECVD)	Variable plasma properties providing high density, low ion energy, and low pressure plasma deposition of dielectric films. Low stress plasma chemical vapour deposition of low-stress films to satisfy mechanical requirement of MEMS devices. A large variety of substrates from wafers up to 200 mm diameter to parts loaded on carriers can be processed	Microelectronics Research Group
The University of Western Australia	Reactive Ion Etching (RIE)	System for plasma enhanced chemical vapour deposition system (PECVD) and reactive ion etching (RIE)	Microelectronics Research Group
The University of Western Australia	Spin coating and wafer development	Softbake, post-exposure bake and hardbake processes.	Microelectronics Research Group
The University of Western Australia
The University of Western Australia	Thermal evaporation	Thermal evaporator designed for Zinc Sulfide deposition	Microelectronics Research Group
The University of Western Australia	Thermal evaporation	Custom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity	Microelectronics Research Group
The University of Western Australia	Electron Beam Evaporation (E-Beam Evaporation)	Ability to deposit ultra pure films of materials with high melting points, and other materials that are difficult to deposit by resistance evaporation. The tool allows thick film deposition and also multiple coatings.	Microelectronics Research Group
The University of Western Australia
The University of Western Australia	Semiconductor parameter analyser	Digital sweep parameter. Used for failture analysis and automated incoming inspection	Microelectronics Research Group
The University of Western Australia	Hall effect measurement system	2T electromagnet to perform Hall effect measurements	Microelectronics Research Group
The University of Western Australia	Semi-automatic wafer probe station	Probe station with B&L Microzoon	Microelectronics Research Group
The University of Western Australia	Laser Beam Induced Current (LBIC) Scanning Laser Microscopy	Mapping of material quality and device performance using a laser induced current	Microelectronics Research Group
The University of Western Australia	Optical microscopy	Provides sub-micron 3D observation/measurement with the ability to compare very rough surface shapes	Microelectronics Research Group
The University of Western Australia	Annealing	A cold wall bench top rapid thermal processor, to provide high cooling rates and low memory effect of the process chamber	Microelectronics Research Group
The University of Western Australia	Wafer Bonding	Manual flip chip bonder with high accurace of 0.5 µm	Microelectronics Research Group